KR KR20120102230A
The inspection apparatus of the semiconductor device comprises the multiple test sockets which includes the ID information pattern for discrimination while accommodating the semiconductor device. It is in order to examine the electrical characteristic of the semiconductor device test sockets are detachable connected electrically with the test socket. ID readers are respectively connected electrically with ID information patterns of test sockets. And the ID signal of the test socket is generated whenever the test of the semiconductor device is performed. The accumulator is connected electrically with ID readers. And the ID signal of the test socket is accumulated and the test process times of the test socket is stored.
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