CN CN110875222B

Equipment front-end device and operation method thereof

Publication no.

CN110875222B
Priority date
2018-08-30
Filing date
2019-08-30
Published
2022-05-03
Granted
2022-05-03
Assignee
台湾积体电路制造股份有限公司
Inventor

邱志强

Abstract

13. The equipment front end device of claim 10, wherein the first air curtain system is configured to generate the first air curtain extending through the first machine access port and including a vertical airflow. 14. The equipment front end device of claim 10, wherein the first air curtain system …

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