KR KR20250050185A
The present invention relates to a laser irradiation device overlapping a plurality of pad electrodes disposed on a substrate and a plurality of bump electrodes disposed to correspond to the plurality of pad electrodes, respectively, and irradiating a laser to a metal layer having a non-uniform thickness to form a plurality of metal patterns spaced apart from each other in a first direction. The laser irradiation device of the present invention comprises: an optical system including a light source emitting a laser; a pattern mask to which the laser emitted from the optical system is incident and including a plurality of patterns through which the laser passes; and a moving module for controlling an area to which the laser is irradiated to the metal layer by moving the pattern mask in a direction perpendicular to the substrate while irradiating the laser to the metal layer. A plurality of pad electrodes and plurality of bump electrodes is electrically connected with a plurality of metal patterns.
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