IN IN7693DELNP2014A
A liquid processing system of an embodiment of the present invention i s provided with the following: n levels (n is 2 or a natural number larger than 2) of processing units, in which each processing unit has one or a plurality of processing lines and each processing line has an ultraviolet irradiating unit, and m which the number of processing lines of the m-th level (m is a natural number smaller than n ) processing unit is larger than the number of processing lines of the m +1- th level processing unit; and an adjustment means that adjusts the output of the ultraviolet irradiating units disposed on the given levels of processing units. The respective outputs of the ultraviolet irradiating units disposed on processing units other than the given levels of processing units are fixed, and the adjustment means adjusts the output of the ultraviolet irradiating units disposed on the given levels of processing units so that the post processed liquid at the n-th level processing unit, which is the final level, will be at the desired processed condition.
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