IN IN1802DE2012A

"MEMS BASED ENERGY EFFICIENT SENSORS ON OXIDE PLATFORM IN SILICON SUBSTRATE FOR DETECTION OF VOLATILE ORGANIC COMPOUNDS AND GASES"

Publication no.

IN1802DE2012A
Priority date
2012-06-12
Filing date
2012-06-12
Published
2015-10-16
Assignee
INDIAN INST TECHNOLOGY DELHI [IN]
Inventors

CHANDRA SUDHIR [IN], PANDYA HARDIK JEETENDRA [IN]

Abstract

The present invention relates to a sensor, more precisely energy efficient sensors on a silicon substrate for detecting gases and Volatile Organic Compounds (VOCs), especially vapours of methanol, and a method of fabricating the sensor on the silicon substrate using trench formation, backfill and Chemical Mechanical Polishing (CMP).

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Bibliographic data via the European Patent Office's Open Patent Services (DOCDB) . Republished here for research and prior-art review. This page is not legal advice, and its presence in our index says nothing about the validity or enforceability of the document. For the Indian legal position (status, oppositions, renewals), see InPASS.