US US20260236840A1
Provided is a method of training a virtual measurement model of a substrate. The virtual measurement model includes a first model and a second model. The method includes identifying at least one piece of representative data determined based on a plurality of input data associated with a process of processing the substrate, training the first model, based on input data and the at least one piece of representative data, to extract and output a feature of the input data and a feature of the at least one piece of representative data, and training the second model, based on the feature of the input data and the feature of the at least one piece of representative data outputted from the first model, to generate virtual measurement data corresponding to the input data.
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