CN CN109270480B

Method for detecting source monitoring unit

Publication no.

CN109270480B
Priority date
2018-10-15
Filing date
2018-10-15
Published
2021-09-03
Granted
2021-09-03
Assignee
上海华虹宏力半导体制造有限公司
Inventor

韩斌

Abstract

s2, connecting the source monitoring unit with two probes on a corresponding probe card aiming at each source monitoring unit; s3, under the same condition, using each source monitoring unit to test the current on the probe card or the voltage between two probes for multiple cycles; and and S4, …

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