EP EP4786573A1
A device for delivering charged entities into biological cells of a biological cellular material, comprising a microelectrode array for supporting the biological cellular material, the microelectrode array comprising individually addressable electrodes made of an electrically-conductive CMOS-compatible material having an oxide top layer, and the charged entities electrostatically coupled to the oxide top layer. The oxide top layer may be a native oxide top layer. The charged entities can be negatively charged entities electrostatically attached to positively charged carriers directly attached to the oxide top layer, or positively charged entities encapsulated in a negatively charged carrier electrostatically coupled to the native oxide top layer. The electrically-conductive CMOS-compatible material can be a metal, metal nitride, or metal oxide. Charged entities differing in their characteristics may be electrostatically coupled to distinct electrodes of the microelectrode.
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