KR KR101516828B1
A system and method for evaluating wafer test probe cards 50 under real wafer test cell conditions integrates specific wafer cell components into a probe card inspection and analysis process. The disclosed embodiments provide a method and system for testing a wafer during a probe card inspection and analysis process using conventional and / or modified wafer test cell components, such as a head plate 360, a test head 330, a signal delivery system 340, Test cell dynamics can be emulated.
Wafer test probe card, wafer cell component, head plate, test head, signal delivery system
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