KR KR20090091236A
System and the method for evaluating the wafer test probe card (50) under actual wafer test cell conditions integrate specific wafer cell components to the probe card inspection and analysis process. By using the headplate (360), the test head (330), and wafer test cell components like the signal transmission system (340) and the transformed manipulator, the wafer test cell dynamics can be emulated by the disclosed embodiment for the probe card inspection and analysis process.
KEYWORDS
The wafer test probe card, wafer cell component, headplate, test head, signal transmission system.
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