WO WO2009048618A1
A probe card analyzer mounts on a probe card in a wafer prober and a use a fixture in the wafer probe and switch electronics in place of an ATE head. Methods of testing can confirm that probe cards are operating within their specifications over large temperature ranges and the mechanical force ranges seen in real manufacturing environments. This reduces the cost and improves the accuracy and speed of analyzing probe cards and improves diagnosing problems with probe cards.
A document turning up in a search is not the same as a document that anticipates your claims. Our registered Patent Agents read the claims, not just the abstract, and tell you where you still have room.
Protect Your InventionBibliographic data via the European Patent Office's Open Patent Services (DOCDB) — republished here for research and prior-art review. This page is not legal advice, and its presence in our index says nothing about the validity or enforceability of the document. For the Indian legal position — status, oppositions, renewals — see InPASS.