US US10550020B2

Ultraviolet light activated oxidation process for the reduction of organic …

Publication no.

US10550020B2
Priority date
2006-06-06
Filing date
2019-07-08
Published
2020-02-04
Granted
2020-02-04
Assignee
Evoqua Water Technologies Llc
Inventor

Steve D. Sitkiewitz

Abstract

In a system for decomposing organic compounds in water for use in semiconductor manufacturing, a chemical reactor vessel having a fluid inlet and a fluid outlet, a persulfate anion addition system upstream of the reactor vessel, and a light emitting device contained within the reactor vessel. The …

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