US US9684053B2
To test a probe card with an examination apparatus that tests a device under test, provided is a test system that tests a device under test and includes a test section that includes a plurality of test units that input or output a signal; a probe card that includes a plurality of probe terminals connected to a terminal of the device under test, and transmits signals between the device under test and the test section; and a wafer for testing that is connected to the probe card, instead of the device under test, when testing the probe card, and includes a connection wire that electrically connects two of the probe terminals to each other. The test section measures output of at least one of two test units connected to the two probe terminals, and judges pass/fail of the two probe terminals.
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